Digital guide
You are here:
AMAT 0010-37741
- Product Name: High-Voltage (HV) Power Module
- Product Description: A compact high-voltage power supply module designed to provide bias voltages for electrostatic chucks and electrode biasing in semiconductor chambers.
- Technical Specifications:
- Output Voltage: 0-5000V DC (adjustable)
Detailed content
-
- Output Current: 0-5mA
- Ripple: <0.1% of output
- Stability: ±0.05% per hour
- Input Voltage: 24V DC
- Isolation Voltage: 7.5 kV DC
- Dimensions: 150 x 100 x 50 mm
- Weight: 0.8 kg
- Functional Features:
- Ultra-stable high-voltage output with low ripple
- Short-circuit and arc protection with auto-recovery
- Voltage programming via 0-10V analog signal
- Over-voltage and over-temperature shutdown
- High-frequency switching design for high efficiency
- Compact potted construction for high isolation
- Remote on/off control interface
- Applications: Electrostatic chuck (ESC) bias power; electrode biasing for PVD, CVD, and Etch chambers; used in Endura & Centura platforms.
