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AMAT 0010-30057
Product Name: 300mm Electrostatic Chuck (ESC) Heater Assembly
Product Description: A complete integrated heater assembly for 300mm electrostatic chucks, providing uniform, precise wafer heating while maintaining electrostatic clamping capability.
Technical Specifications:
- Wafer Compatibility: 300mm (12-inch)
Detailed content
- Heating Element: Kanthal resistive heating coil, hermetically sealed
- Temperature Range: 100°C to 600°C
- Temperature Uniformity: ±1.5°C across wafer surface
- Power Rating: 2.5kW, 208V AC, 3-phase
- Insulation Material: Aluminum nitride (AlN) ceramic
- Clamping Voltage: 2kV DC (ESC function)
- RTD Sensor: Dual Pt100 for closed-loop control
Functional Features:
- Ultra-uniform heating profile for consistent thin-film deposition
- Fast thermal response with rapid ramp-up/cool-down rates
- High dielectric strength for safe high-voltage ESC operation
- Hermetic sealing to prevent process gas contamination
- Integrated thermal isolation to minimize heat loss
Application Scenarios: Precision heating of 300mm wafers in high-vacuum PVD (Endura), CVD (Centura), and ALD chambers for advanced metallization and dielectric processes.
