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AMAT 0010-30029
Product Name: P-Chuck Lift Assembly (Precision 5000)
Product Description: A complete electromechanical lift assembly for the pedestal chuck (P-Chuck) in AMAT Precision 5000 CVD systems. It controls the vertical elevation of the wafer chuck for processing and wafer transfer.
Technical Specifications:
- Compatibility: Designed exclusively for AMAT Precision 5000 CVD platforms.
Detailed content
- Actuation: Integrated servo-motor drive with precision lead screw mechanism.
- Positioning: High-precision vertical positioning with encoder feedback.
- Construction: Hard-anodized aluminum and stainless steel for vacuum compatibility.
- Weight: 2.3 kg
Functional Features:
- Delivers smooth, repeatable vertical motion with high positioning accuracy.
- Integrated limit switches for over-travel protection and home position calibration.
- Designed for high-cycle operation with minimal maintenance requirements.
- Compatible with the system’s vacuum and control interfaces.
Application Scenarios:
- Controls wafer pedestal elevation in Precision 5000 CVD chambers.
- Critical for wafer loading/unloading and maintaining optimal process gaps during thin-film deposition
