Digital guide
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AMAT 0010-21828
Product Name: Wafer Lift Pin Assembly
Product Description: A precision-engineered wafer lift pin assembly designed for vertical positioning of wafers in semiconductor process chambers, ensuring accurate, repeatable wafer handling with minimal contamination.
Technical Specifications:
- Material: High-purity alumina ceramic (99.8%)
Detailed content
- Length: 130 mm
- Diameter: 6.5 mm
- Tip Radius: 1.2 mm
- Surface Finish: Polished to Ra <0.1 μm
- Operating Temperature: -40°C to +620°C
- Compressive Strength: >2600 MPa
- Wear Resistance: Excellent under high-vacuum conditions
- Dimensional Tolerance: ±0.01 mm
Functional Features:
- Ultra-smooth surface to prevent wafer scratching
- High wear resistance for extended service life
- Excellent thermal stability at elevated temperatures
- Chemical inertness to process environments
- Precision manufacturing for consistent performance
- Low particle generation during operation
- Compatibility with standard lift mechanisms
Application Scenarios:
- Semiconductor process chamber wafer lifting
- Wafer positioning systems
- Vacuum chamber wafer handling
- PVD/CVD equipment wafer support
- Semiconductor manufacturing automation
