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AMAT 0010-17454
Product Name: Electrostatic Chuck (ESC) Power Feedthrough Assembly
Product Description: A hermetically sealed, high-voltage electrical feedthrough designed to transmit ESC clamping voltage and signal from the atmospheric side to the ultra-high vacuum side of a process chamber. It provides electrical isolation while maintaining vacuum integrity.
Detailed content
Technical Specifications:
- Voltage Rating: 5kV DC (clamping voltage)
- Current Rating: 1A
- Insulation Material: High-purity alumina (Al₂O₃)
- Conductor: Nickel-plated copper
- Vacuum Seal: Metal brazed (Kovar to ceramic)
- Leak Rate: < 1×10⁻⁹ atm-cc/sec He
- Temperature Range: -20°C to +200°C
- Flange: DN40CF (ConFlat)
Functional Features:
- Ultra-low leakage for stable high-voltage operation
- High dielectric strength to prevent arcing
- Hermetic, bakeable construction for UHV compatibility
- Resistance to plasma and process gas corrosion
- Long service life under cyclic high-voltage stress
Application Scenarios: Provides high-voltage power to 200mm/300mm electrostatic chucks in PVD, CVD, and dielectric etch chambers.
