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AMAT 0010-16001
Brand & Part Number: Applied Materials (AMAT) 0010-16001
Product Name: Electrostatic Chuck (ESC) / Heater Pedestal Assembly
Product Description: A combined wafer clamping and heating pedestal, providing precise temperature control and electrostatic wafer retention during processing.
Detailed content
Technical Specifications:
- Type: Monopolar or Bipolar electrostatic chuck
- Heating: Integrated dual-zone resistive heating elements
- Temperature Range: Ambient to 450°C
- Temperature Uniformity: ±1°C across wafer surface
- Material: Aluminum nitride (AlN) or anodized aluminum
Functional Features:
- Provides strong, uniform electrostatic clamping force
- Precise PID temperature control for critical thermal processes
- High thermal conductivity for rapid heat transfer to the wafer
- Integrated RF biasing capability for plasma processes
Application: Core component in Etch, PVD, and CVD chambers, serving as the wafer stage for 200mm/300mm processing.
