Digital guide
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AMAT 0010-10371
Product Name: Optical Interlock Sensor Assembly
Product Description: A non-contact optical sensor assembly used to detect the presence/position of components and ensure safety interlock conditions in semiconductor equipment.
Technical Specifications:
- Type: Through-beam optical sensor
Detailed content
- Light Source: Infrared LED (940nm)
- Supply Voltage: 24V DC
- Output: NPN/PNP configurable digital signal
- Enclosure: IP65 sealed, stainless steel
Functional Features:
- High immunity to ambient light and electrical noise.
- Non-contact operation ensures no wear and long life.
- Fast response time for immediate safety interlock response.
- Sealed design for use in vacuum and harsh fab environments.
Application Scenarios: Door, cover, and component position interlocks on mainframes, load locks, and process modules.
