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Technical Specifications:
- Processor: 32-bit high-performance RISC controller
- Memory: 16 MB SDRAM, 32 MB Flash non-volatile memory
- Communication Interfaces: Ethernet, RS-485, DeviceNet
- Operating Voltage: 24V DC (redundant input)
- Power Consumption: 8.5W maximum
- Operating Temperature: 0°C to +60°C
- Dimensions: 147 mm × 51.5 mm × 114 mm
- Weight: 0.6 kg
Functional Features:
- Real-time processing for precise local control functions
- Galvanic isolation for all I/O signals
- Built-in self-test (BIST) and fault diagnostics
- Firmware upgradable without hardware replacement
- High EMI immunity in plasma processing environments
- Non-volatile memory retains parameters during power loss
Application: Deployed as a local controller for vacuum systems, gas panels, and wafer handling subsystems.
