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AMAT 0010-09822
Product Name: Precision Machined Chamber Lid / Bolt-Down Cover Assembly
Product Description: A high-precision, heavy-duty structural cover assembly designed to seal the top opening of semiconductor process chambers. It provides a vacuum-tight seal, structural integrity, and mounting interface for internal components while maintaining ultra-clean conditions.
Technical Specifications:
- Material: High-strength, low-outgassing 6061-T6 aluminum alloy
Detailed content
- Surface Finish: Electropolished & passivated, Ra < 0.8 μm for low particle adhesion
- Seal Interface: Precision-machined centering ring and knife-edge for metal C-seal / elastomer seal compatibility
- Mounting: Bolt-down pattern with precision counter-bores for uniform compression
- Cleanliness: Manufactured & packaged in Class 100 cleanroom
- Vacuum Rating: Compatible with UHV conditions, leak rate < 1 x 10⁻⁹ mbar·l/s
Key Features:
- Exceptional dimensional stability under thermal cycling and vacuum conditions
- Optimized rigidity to minimize vibration and ensure internal component alignment
- Non-shedding, corrosion-resistant surface prevents contamination
- Precision alignment features ensure perfect fit and seal repeatability
- Designed for quick installation and removal during preventive maintenance
Application Scenarios:
Used as the primary top-sealing lid on AMAT P5000, Centura Etch, and PVD chambers. Primarily deployed in dielectric etch, metal etch, and physical vapor deposition processes requiring robust vacuum integrity.
