Digital guide
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Detailed content
- Orifice Size: Custom sized for specific flow requirements
- Pressure Range: 1 Torr to 760 Torr operating range
- Leak Rate: <1×10⁻⁹ atm-cc/sec He
- Materials: 316L stainless steel, aluminum, high-temperature elastomers
- Control Signal: 0-10V or 4-20mA analog control
Functional Features:
- Precise, repeatable flow control characteristics
- Fast response time for pressure regulation
- Zero dead volume design for minimal gas retention
- Easy maintenance and component replacement
- Compatibility with corrosive process gases
- Integrated position feedback for closed-loop control
Application Scenarios:
- Vacuum chamber pressure control
- Process gas delivery regulation
- Exhaust flow management
- Vacuum pump inlet control
- Gas mixing and distribution systems
