Digital guide
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AMAT 0010-09301
Product Name: P5000 Throttle Valve Actuator Assembly
Product Description: A precision pneumatic actuator assembly for controlling the position of vacuum throttle valves, regulating gas flow and pressure within semiconductor process chambers.
Technical Specifications:
- Actuator Type: Double-acting pneumatic piston
Detailed content
- Supply Pressure: 4-6 bar (58-87 PSI)
- Stroke Length: 25mm
- Position Feedback: Analog potentiometer (0-5V DC)
- Shaft Material: 316L stainless steel
- Seal Material: Kalrez (perfluoroelastomer)
- Temperature Rating: -10°C to +120°C
- Response Time: ≤ 100ms
Functional Features:
- High-precision positional control for accurate pressure regulation
- Zero backlash design for stable, repeatable positioning
- Corrosion-resistant materials compatible with process gases
- Fail-safe lock-up on loss of air pressure
- Low-friction bearings for long service life
Application Scenarios: Pressure control in AMAT P5000 TEOS/PECVD chambers, regulating gas flow during thin-film deposition processes.
