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AMAT 0010-09292

Product Name: RF Match Network Capacitor Assembly

Product Description: High-voltage capacitor assembly for impedance matching networks in RF plasma processing equipment.

Technical Specifications:

  • Capacitance: 1000pF ±5%
  • Voltage Rating: 15kV DC

Detailed content

  • Dielectric Material: High-performance ceramic
  • Construction: Air-cooled, sealed enclosure
  • Termination: Nickel-plated brass terminals
  • Operating Temperature: -20°C to +85°C

    Functional Features:

  • Stable capacitance under high RF power conditions
  • Low equivalent series resistance for efficient power transfer
  • High voltage insulation for safe operation in plasma environments
  • Durable construction for continuous industrial operation
  • Compatible with standard RF match network designs

    Application Scenarios:

  • RF impedance matching networks in PECVD chambers
  • Impedance tuning for plasma etching systems
  • High-frequency RF power delivery circuits
  • Centura and Endura platform RF subsystems

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