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AMAT 0010-09181
Brand & Part Number: Applied Materials (AMAT) 0010-09181
Product Name: Precision DC Power Supply Module
Product Description: A high-stability, regulated DC power supply unit for precision semiconductor process control.
Technical Specifications:
- Input Voltage: 208V AC 3-phase
Detailed content
- Output Voltage: 0–60V DC (adjustable)
- Output Current: 0–50A
- Ripple & Noise: < 10 mV p-p
- Regulation: Line/Load ± 0.01%
Functional Features:
- Constant voltage / constant current (CV/CC) auto-switching
- Over-voltage, over-current, and over-temperature protection
- High efficiency (> 85%)
- Analog & digital control interfaces
Application: Provides bias power for electrostatic chucks (ESC), RF systems, and process controllers on Precision P5000 platforms.
