Digital guide
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AMAT 0010-09035
Product Name: ESC (Electrostatic Chuck) Interface Module
Product Description: A dedicated control module that interfaces between the system controller and the Electrostatic Chuck (ESC), providing the necessary high-voltage and control signals.
Technical Specifications:
- Output Voltage: Programmable high-voltage DC (up to kilovolt range)
Detailed content
- Control Interface: Digital communication (RS-232 / DeviceNet)
- Features: Over-voltage, over-current, and arc fault protection
Functional Features:
- Generates stable clamping voltage for secure wafer holding without physical contact.
- Provides real-time monitoring and feedback on ESC status and clamping force.
- Protects the wafer and chamber from electrical faults and discharges.
Application Scenarios: Vacuum process chambers using electrostatic wafer clamping (CVD, PVD, Etch).
