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AMAT 0010-06825 Wafer Alignment Sensor Assembly
Product Overview: The AMAT 0010-06825 is a high-precision wafer alignment sensor assembly designed for Applied Materials semiconductor equipment. It provides real-time, non-contact wafer alignment and notch detection, ensuring precise wafer positioning within process chambers and wafer handling systems. This assembly features advanced optical sensing technology, high-speed data processing, and seamless integration with AMAT’s control systems.
Technical Specifications:
- Sensing Technology: Laser-based optical alignment, with a 650nm red laser source.
- Alignment Accuracy: ±0.005mm for wafer centering, ±0.01° for notch detection.
Detailed content
- Response Time: ≤10ms for alignment measurement and data output.
- Wafer Compatibility: 200mm and 300mm wafers, with standard notch or flat orientations.
- Operating Environment: Cleanroom Class 1, temperature 18–25°C, humidity 40–60% (non-condensing).
- Output: Digital RS-485 and analog 0–10V signals for equipment control integration.
- Dimensions: 100mm×80mm×60mm, weight 0.8kg.
- Certification: Complies with SEMI S2/S8 safety standards and ISO 14644-1 cleanroom requirements.
Functional Features:
- Provides non-contact, high-precision wafer alignment and notch detection.
- Delivers fast response times for real-time process control.
- Resists contamination, with a sealed, cleanroom-compatible design.
- Seamless integration with AMAT’s wafer handling and process control systems.
- Minimizes particle generation, with smooth, anti-static surfaces.
- Easy to calibrate and maintain, ensuring long-term reliability.
Application Scenarios:
- Installed in AMAT process chambers and wafer handling systems for wafer alignment.
- Used in 200mm and 300mm wafer fabs for logic, memory, and power semiconductor manufacturing.
- Applied in processes requiring precise wafer positioning (≤5nm nodes).
- Ideal for high-volume production lines requiring consistent wafer alignment.
- Deployed in R&D facilities for wafer process development and alignment optimization.
