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AMAT 0010-02991
Product Name: Robot Blade Assembly (End Effector)
Product Description: A precision, lightweight robotic arm blade used for contactless handling of silicon wafers in semiconductor wafer processing systems.
Technical Specifications:
- Material: Advanced ceramic (Al₂O₃/SiC) or carbon fiber composite for high strength-to-weight ratio.
Detailed content
- Design: Thin, fork-style design with precision-machined contact pads.
- Coating: Low-friction, non-contaminating coating (e.g., Diamond-like Carbon – DLC).
Functional Features:
- Ultra-Flatness: Precisely controlled flatness to prevent wafer breakage or slip.
- Non-Particle Generation: Smooth, non-shedding surfaces for cleanroom compatibility.
- High Rigidity: Maintains stability at high accelerations/decelerations.
- Chemical Inertness: Resistant to cleaning solvents and process vapors.
Application: Used in AMAT wafer handling robots (e.g., Centura Indexer) for 150mm/200mm wafer transfer between process modules.
