Digital guide
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AMAT 0010-02657
- Brand & Part Number: Applied Materials (AMAT) 0010-02657
- Product Name: Heater Pedestal Assembly
- Product Description: A precision-engineered heater pedestal assembly designed for semiconductor wafer processing chambers. It integrates a high-performance heating element with a robust support structure to deliver uniform thermal distribution for wafers during deposition and thermal treatment processes.
Detailed content
- Technical Specifications:
- Material: High-purity aluminum nitride (AlN) ceramic or anodized 6061-T6 aluminum alloy
- Heating Element: Alloy resistance heater with dual-zone configuration
- Temperature Range: 100°C to 550°C
- Temperature Uniformity: ±1.5°C across 200mm wafer surface
- Power Rating: 1.2kW
- Sensor: Integrated Type K thermocouple for closed-loop control
- Mounting: Flange-mounted with vacuum-compatible seals
- Functional Features:
- Dual-zone heating enables precise radial temperature profiling
- High thermal conductivity ensures rapid heat transfer to wafer
- Low outgassing design suitable for ultra-high vacuum (UHV) environments
- Excellent thermal stability minimizes drift during extended operation
- Rugged construction withstands thermal cycling and mechanical stress
- Direct replacement fit for AMAT Centura platforms
- Applications:
- Wafer heating in PVD, CVD, and ALD process chambers
- Thermal processing in AMAT Centura 5200/5300 systems
- 200mm wafer semiconductor manufacturing platforms
