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AMAT 0010-01286 Wafer Cassette Loader Assembly
Product Overview: The AMAT 0010-01286 is a precision-engineered wafer cassette loader assembly designed for Applied Materials automated wafer handling systems. It provides automated loading and unloading of wafer cassettes into equipment load locks, enabling seamless integration with fab automation systems. This assembly features a robust mechanical design, precise positioning, and compatibility with standard 200mm/300mm wafer cassettes.
Technical Specifications:
- Cassette Compatibility: Standard 200mm (25-slot) and 300mm (25-slot) wafer cassettes.
- Positioning Accuracy: ±0.05mm for cassette placement, repeatability ±0.02mm.
Detailed content
- Operating Speed: Maximum linear speed 0.8m/s, acceleration 1.5m/s².
- Actuation: Servo-driven linear motion, with closed-loop position control.
- Load Capacity: Maximum cassette weight 10kg (including wafers).
- Operating Environment: Cleanroom Class 1, temperature 18–25°C, humidity 40–60% (non-condensing).
- Safety Features: Emergency stop, cassette presence detection, and anti-collision sensors.
- Dimensions: 600mm×400mm×500mm, weight 25kg.
- Certification: Complies with SEMI S2/S8 safety standards and ISO 14644-1 cleanroom requirements.
Functional Features:
- Provides automated cassette loading/unloading, improving equipment efficiency.
- Delivers precise cassette positioning, ensuring reliable wafer transfer.
- Robust design handles heavy cassettes with minimal vibration.
- Integrated safety features prevent equipment damage and wafer loss.
- Seamless integration with AMAT’s wafer handling robots and fab automation systems.
- Easy to maintain, with accessible components for cleaning and repair.
Application Scenarios:
- Installed in AMAT Centura, Endura, and Producer equipment load locks.
- Used in 200mm and 300mm wafer fabs for automated cassette handling.
- Applied in high-volume production lines requiring seamless fab automation.
- Ideal for fabs with 300mm wafer manufacturing and automated material handling systems.
- Deployed in R&D facilities for automated wafer processing development.
