Digital guide
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AMAT 0010-01195
- Brand & Part Number: Applied Materials (AMAT) 0010-01195
- Product Name: Magnet Assembly for Plasma Control
- Product Description: A precision-engineered magnetic assembly designed to control plasma confinement and uniformity in semiconductor etch and deposition chambers. It generates controlled magnetic fields to optimize plasma distribution across wafer surfaces.
Detailed content
- Technical Specifications:
- Magnet Material: High-grade neodymium-iron-boron (NdFeB)
- Magnetic Field Strength: 500–1500 gauss (surface)
- Configuration: Multi-pole segmented array
- Housing: Non-magnetic 316L stainless steel
- Operating Temperature: Up to 150°C
- Coating: Nickel-copper-nickel triple plating for corrosion protection
- Mounting: Precision flanged with alignment pins
- Functional Features:
- Uniform magnetic field distribution improves process uniformity
- Enhanced plasma confinement increases process efficiency
- High-temperature stability maintains magnetic properties
- Corrosion-resistant housing extends service life
- Precision alignment ensures consistent field positioning
- Low outgassing materials compatible with UHV environments
- Applications:
- Plasma confinement in etch and PVD chambers
- AMAT Centura etch and MXP PVD platforms
- Processes requiring magnetic field-enhanced plasma control
- Uniform layer deposition across 200mm wafers
