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AMAT 0010-00750
Product Name: Bolt-Down Cover / Chamber Top Plate Assembly
Product Description: A robust, precision-machined top cover assembly engineered to secure and seal process chamber environments. It serves as a structural barrier and mounting platform for internal fixtures, ensuring vacuum integrity and process stability.
Technical Specifications:
- Material: Solid 316L stainless steel or high-grade aluminum alloy
Detailed content
- Dimensional Tolerance: ±0.005″ for critical sealing surfaces
- Surface Treatment: Passivation (stainless steel) / Hard anodization (aluminum)
- Flange Design: Flat-face with precision O-ring groove for vacuum sealing
- Hardware: Includes captive fasteners to prevent hardware loss inside chamber
- Weight: Optimized for structural strength while minimizing load on chamber body
Key Features:
- One-piece solid construction for maximum rigidity and zero leak paths
- Captive screw design eliminates risk of loose parts contaminating the process
- Excellent resistance to corrosion from process gases and cleaning chemistries
- Easy to clean and maintain, with smooth surfaces that resist particle trapping
- Interchangeable with standard chamber interfaces for broad compatibility
Application Scenarios:
Installed on AMAT P5000 etch systems and older Centura platforms. Used in both etch and deposition processes where a secure, bolted chamber closure is required.
