Digital guide
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AMAT 0010-00561
- Product Name: Emission Detector Assembly
- Product Description: Optical emission detector designed to monitor plasma light intensity and spectral emissions within semiconductor process chambers. It provides real-time feedback for plasma process control and endpoint detection.
- Technical Specifications:
- Detection Range: 200-1100 nm (UV to Near-IR)
Detailed content
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- Sensor Type: High-sensitivity photodiode array
- Gain Control: Programmable auto-gain adjustment
- Output Signal: Analog 0-10V & Digital RS-485
- Supply Voltage: 24V DC
- Isolation: Optical isolation between sensor and output
- Operating Temperature: 0°C to 50°C
- Functional Features:
- Real-time plasma emission intensity monitoring
- High signal-to-noise ratio for low-level light detection
- Fast response time (< 10 ms) for dynamic process tracking
- Built-in ambient light rejection
- Field-adjustable sensitivity and trigger thresholds
- Diagnostic LED for operational status indication
- Applications: Plasma endpoint detection in Etch and PVD chambers; process monitoring for deposition rate control in Centura and Endura platforms.
